Izibuko zeCarmanhaas okanye izibonakaliso zizonke zisetyenziswa kwi-laser ye-laser njengoko zisemva kweZibuko, kwaye zingena ngaphandle kweenkqubo zeBeam kwiinkqubo zokuhambisa i-beam.
I-Silicon yeyona ndawo isetyenziswayo i-subrib esetyenziswayo; Inzuzo yayo ziindleko eziphantsi, ukuqina okufanelekileyo, kunye nokuzinza komzimba.
I-Molybdenum isibuko kakhulu esinzima kakhulu senza ukuba ibe yeyona nto ifuna indawo yokuhlala. Isipili sihlala sinomdla.
| Inkcazo | Imigangatho |
| Ukunyamezelana | +0.000 "/ 0.005" |
| Ukunyamezelana kobunzima | ± 0.010 " |
| I-faralism: (iplano) | ≤ Imizuzu emi-3 ye-ARC |
| I-Aperture ecacileyo (ifuthe) | I-90% yobubanzi |
| Umzobo ophezulu @ 0.63um | Amandla: 2 frivelan, ukungangqinelani: 1 fringe |
| I-scratch-dig | I-10-5 |
| Igama lemveliso | Ububanzi (mm) | Et (mm) | Ukuthuthumela |
| Mobrit | 30 | I-3/6 | AKUKHO MIROEYO, AOI: 45 ° |
| 50.8 | 5.08 | ||
| Isipili seSilicon | 30 | I-3/4 | Hr @ 106um, AOI: 45 ° |
| 38.1 | 4/8 | ||
| 50.8 | 9.525 |
